This paper details the development of an integrated AC electro-osmotic (ACEO)microfluidic pump for dilute electrolytes consisting of a long serpentinemicrochannel lined with three dimensional (3D) stepped electrode arrays. Usinglow AC voltage (1 Volt rms, 1 kHz), power (5 mW) and current (3.5 mA) in water,the pump is capable of generating a 1.4 kPa head pressure, a 100-fold increaseover prior ACEO pumps, and a 1.37 mm/sec effective slip velocity over theelectrodes without flow reversal. The integrated ACEO pump can utilize lowionic strength solutions such as distilled water as the working solution topump physiological strength (100 mM) biological solutions in separatemicrofluidic devices, with potential applications in portable or implantablebiomedical microfluidic devices. As a proof-of-concept experiment, the use ofthe ACEO pumps for DNA hybridization in a microfluidic microarray isdemonstrated.
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